Start with high-confidence nanotech & mems books, then narrow by subgenre or adjacent topics.
The Supramolecular Chemistry of Organic-inorganic Hybrid Materials
Knut Rurack, Ramon Martinez-Manez
Composites With Micro- and Nano-structure
Vladimír Kompiš, Vladimír Kompis
Nanoscience and Nanotechnology
Marcel Van de Voorde, Cecilia Bartolucci
Computational Chemistry and Molecular Modeling
K. I. Ramachandran, Gopakumar Deepa
2d and 3d Nanostructures
Jean-Claude Serge Levy, Jean-Claude Serge Lévy